Characterization of nylon membranes for nano-particle filtration

Majid Entezarian; Kristy Bellview; Sandeep Singh

doi:10.1117/12.3011159

9 April 2024 Characterization of nylon membranes for nano-particle filtration

Majid Entezarian, Kristy Bellview, Sandeep Singh

Proceedings Volume 12957, Advances in Patterning Materials and Processes XLI; 1295728 (2024) https://doi.org/10.1117/12.3011159
Event: SPIE Advanced Lithography + Patterning, 2024, San Jose, California, United States

Conference Poster

Abstract

The purity of fluids exposed to a wafer is critical as the node sizes are approaching low single digit nanometers. The potential impurities could be solid or semi-solid particles, soluble metal cations, anions, organic species, or gases. All these need to be removed for optimum yield and minimal defects. The technical challenge associated with reducing the node sizes also relates to membranes production as membranes with low single digit pore sizes are needed to remove nanometer impurities. The interest in nylon membrane is twofold as it can mechanically remove fine particles as well as by its adsorptive capabilities. In this study, nylon membranes with pore sizes of 2, 5, 10, and 20nm were characterized for microstructure, flow rate versus pressure drop, bubble point, and metal extractables in PGMEA.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Majid Entezarian, Kristy Bellview, and Sandeep Singh "Characterization of nylon membranes for nano-particle filtration", Proc. SPIE 12957, Advances in Patterning Materials and Processes XLI, 1295728 (9 April 2024); https://doi.org/10.1117/12.3011159

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