A miniature Fourier transform spectrometer based on an electrothermal MEMS mirror with asynchronous calibration

Ruifan Zhao; Qiangqiang Liu; Chao Chen; Jiqiang Cao; Yuan Xue; Donglin Wang; Qian Chen; Huikai Xie

doi:10.1117/12.3008011

18 December 2023 A miniature Fourier transform spectrometer based on an electrothermal MEMS mirror with asynchronous calibration

Ruifan Zhao, Qiangqiang Liu, Chao Chen, Jiqiang Cao, Yuan Xue, Donglin Wang, Qian Chen, Huikai Xie

Author Affiliations +

Proceedings Volume 12962, AOPC 2023: Optical Spectroscopy and Imaging; and Atmospheric and Environmental Optics; 129620G (2023) https://doi.org/10.1117/12.3008011
Event: Applied Optics and Photonics China 2023 (AOPC2023), 2023, Beijing, China

Abstract

In a MEMS mirror-based dual interference Fourier transform spectrometer (FTS) with a laser interferometer as the position sensing mechanism, making the two interferometers coaxial is very challenging. To solve this problem, a single interference MEMS FTS based on asynchronous calibration is designed. This single interference FTS uses a dichroic mirror to couple a laser beam and a broadband light beam into the same interferometer. Since the two optical beams share the same optical path, they will experience the same change when the position of any optical component along the optical path is adjusted. In data acquisition, the two interference signals are acquired asynchronously by the same InGaAs photodetector. This asynchronous calibration can effectively eliminate the laser coupling issue. According to the experimental results, compared with the dual interference spectrometer, the proposed spectrometer based on asynchronous calibration can improve the spectral repeatability and make the system simpler and lower power consumption.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Ruifan Zhao, Qiangqiang Liu, Chao Chen, Jiqiang Cao, Yuan Xue, Donglin Wang, Qian Chen, and Huikai Xie "A miniature Fourier transform spectrometer based on an electrothermal MEMS mirror with asynchronous calibration", Proc. SPIE 12962, AOPC 2023: Optical Spectroscopy and Imaging; and Atmospheric and Environmental Optics, 129620G (18 December 2023); https://doi.org/10.1117/12.3008011

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