Preparation of enhanced Al/MgF2 vacuum ultraviolet reflective coatings using electron-beam evaporation

Zhenfei Luo; Yaowei Wei; Fei Fan; Qinghua Zhang; Jian Wang

doi:10.1117/12.3021031

22 December 2023 Preparation of enhanced Al/MgF₂ vacuum ultraviolet reflective coatings using electron-beam evaporation

Zhenfei Luo, Yaowei Wei, Fei Fan, Qinghua Zhang, Jian Wang

Proceedings Volume 12982, Pacific-Rim Laser Damage 2023: Optical Materials for High-Power Lasers; 129820I (2023) https://doi.org/10.1117/12.3021031
Event: SPIE/SIOM Pacific Rim Laser Damage, 2023, Shanghai, China

Abstract

Aluminum (Al)-based metal-dielectric composite coatings play a crucial role in the production of vacuum ultraviolet (VUV) optical components and laser systems. In the short-wavelength range of the VUV region, there is a high demand for practical Al-based coatings with high reflectivity, which imposes strict requirements on the preparation process. Key parameters of the preparation process, such as deposition rate, film thickness, and deposition temperature, significantly influence the growth and short-wavelength VUV optical properties of the coatings. In this study, we utilized electron-beam evaporation technology to prepare magnesium fluoride (MgF₂) protected Al coatings for short-wavelength VUV reflection. We explored the impact of the aforementioned key process factors on the coatings’ properties and improved the reflectivity of the coatings in the short-wavelength VUV range, achieving reflectivity above 85% at the wavelength of 121.6 nm.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Zhenfei Luo, Yaowei Wei, Fei Fan, Qinghua Zhang, and Jian Wang "Preparation of enhanced Al/MgF₂ vacuum ultraviolet reflective coatings using electron-beam evaporation", Proc. SPIE 12982, Pacific-Rim Laser Damage 2023: Optical Materials for High-Power Lasers, 129820I (22 December 2023); https://doi.org/10.1117/12.3021031

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