Analysis of mirror surface after laser or ion removal of contaminants

Richard C. Benson; C. Brent Bargeron; Terry E. Phillips; O. Manuel Uy

doi:10.1117/12.22597

1 November 1990 Analysis of mirror surface after laser or ion removal of contaminants

Richard C. Benson, C. Brent Bargeron, Terry E. Phillips, O. Manuel Uy

Proceedings Volume 1329, Optical System Contamination: Effects, Measurement, Control II; (1990) https://doi.org/10.1117/12.22597
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Mirrors have been examined using various surface analytical techniques following experiments to remove contaminants using either a CO2 laser or an argon ion gun. Optical microscopy, scanning electron microscopy, and noncontact surface profilometry were used to obtain morphological information about the mirror surface. X-ray photoelectron spectroscopy, energy dispersive X-ray analysis, and gas chromatograph/mass spectrometry were used to investigate the composition of the mirror surface.

Citation Download Citation

Richard C. Benson, C. Brent Bargeron, Terry E. Phillips, and O. Manuel Uy "Analysis of mirror surface after laser or ion removal of contaminants", Proc. SPIE 1329, Optical System Contamination: Effects, Measurement, Control II, (1 November 1990); https://doi.org/10.1117/12.22597

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available