Lateral-periodicity evaluation of multilayer Bragg reflector surface roughness using x-ray diffraction

Hisataka Takenaka; Yoshikazu Ishii

doi:10.1117/12.23313

1 January 1991 Lateral-periodicity evaluation of multilayer Bragg reflector surface roughness using x-ray diffraction

Hisataka Takenaka, Yoshikazu Ishii

Proceedings Volume 1345, Advanced X-Ray/EUV Radiation Sources and Applications; (1991) https://doi.org/10.1117/12.23313
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

The lateral-periodicities of the surface and interfacial roughnesses of a multilayer- Bragg reflector which affect x-ray reflectivity have been examined using the x-ray rocking curve profile measurements and a stylus surface profilometer. Multilayered films have been fabricated by a proprietary sputtering technique. The x-ray rocking curve profiles of the first Bragg reflection of the multilayered films have been examined with a precision x-ray diffractometer. These profiles show that the lateral-periodicity of the film surface and interfacial roughness which primarily affect the CuKa X-ray reflectivity is about 4 rim. The measured CuKa x-ray reflectivity of the multilayered film is in good agreement with calculations which incorporate the estimated film surface and interfacial roughness. 1.

Citation Download Citation

Hisataka Takenaka and Yoshikazu Ishii "Lateral-periodicity evaluation of multilayer Bragg reflector surface roughness using x-ray diffraction", Proc. SPIE 1345, Advanced X-Ray/EUV Radiation Sources and Applications, (1 January 1991); https://doi.org/10.1117/12.23313

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