Dynamic behavior of internal elements of high-frequency integrated circuits studied by time-resolved optical-beam-induced current (OBIC) method

Harald Bergner; Klaus Hempel; Uwe Stamm

doi:10.1117/12.24560

1 February 1991 Dynamic behavior of internal elements of high-frequency integrated circuits studied by time-resolved optical-beam-induced current (OBIC) method

Harald Bergner, Klaus Hempel, Uwe Stamm

Author Affiliations +

Proceedings Volume 1362, Physical Concepts of Materials for Novel Optoelectronic Device Applications II: Device Physics and Applications; (1991) https://doi.org/10.1117/12.24560
Event: Physical Concepts of Materials for Novel Optoelectronic Device Applications, 1990, Aachen, Germany

Abstract

A novel method for the optical testing of integrated circuits with ultrafast timeresolution and microscopic spatial resolution is described. The method is capable of detecting internal logical states switching speeds and propagation delays within complex integrated circuits as well as running times within single elements. In the experi ment a laser scanning microscope was combined with a cw modelocked argonion laser and an OBIC-stage. We achieved the complete mapping of the optical beam induced current signals in IC''s with a time resolu tion of about 100 picoseconds and a spatial resolution of less than

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Harald Bergner, Klaus Hempel, and Uwe Stamm "Dynamic behavior of internal elements of high-frequency integrated circuits studied by time-resolved optical-beam-induced current (OBIC) method", Proc. SPIE 1362, Physical Concepts of Materials for Novel Optoelectronic Device Applications II: Device Physics and Applications, (1 February 1991); https://doi.org/10.1117/12.24560

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