High-resolution differential phase and amplitude optical microscope

Sergei I. Bozhevolnyi; A. V. Postnikov; P. S. Radko

doi:10.1117/12.134900

1 February 1992 High-resolution differential phase and amplitude optical microscope

Sergei I. Bozhevolnyi, A. V. Postnikov, P. S. Radko

Proceedings Volume 1556, Scanning Microscopy Instrumentation; (1992) https://doi.org/10.1117/12.134900
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

A differential phase and amplitude scanning optical microscope for simultaneous and independent detecting variations in surface relief and sample reflectivity is described. Results of surface studies of thin metal layers deposited on Si-wafers are presented. The3depth resolution of 2 A and reflectivity variation sensitivity of 5•lO with the spatial resolution of 2.5 mm are achieved.

Citation Download Citation

Sergei I. Bozhevolnyi, A. V. Postnikov, and P. S. Radko "High-resolution differential phase and amplitude optical microscope", Proc. SPIE 1556, Scanning Microscopy Instrumentation, (1 February 1992); https://doi.org/10.1117/12.134900

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available