Advanced e-beam systems for manufacturing

Hans C. Pfeiffer

doi:10.1117/12.136006

9 July 1992 Advanced e-beam systems for manufacturing

Hans C. Pfeiffer

Proceedings Volume 1671, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II; (1992) https://doi.org/10.1117/12.136006
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

E-beam lithography systems are being employed as pattern generators in the semiconductor manufacturing process. The TV-like raster exposure of a scanning electron beam under computer control provides the resolution, flexibility, and accuracy needed for the generation of high density integrated circuit patterns. E-beam mask making has become the technology of choice, while e-beam direct writing on the wafer has remained largely a niche application. Here the throughput handicap of serial exposure presented an economic hurdle, which limited applications to exploratory research and prototyping rather than manufacturing--with few exceptions: IBM, for example, has applied its internally developed high-throughput EL-series systems worldwide in large scale manufacturing of ASIC-type bipolar logic products. The recent progress in state-of-the-art of manufacturing-oriented e-beam systems for mask making and direct writing, together with results achieved with these advanced systems, is the subject of this paper.

Citation Download Citation

Hans C. Pfeiffer "Advanced e-beam systems for manufacturing", Proc. SPIE 1671, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II, (9 July 1992); https://doi.org/10.1117/12.136006

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available