Fundamental differences between positive- and negative-tone imaging

Chris A. Mack; James E. Connors

doi:10.1117/12.130332

1 June 1992 Fundamental differences between positive- and negative-tone imaging

Chris A. Mack, James E. Connors

Proceedings Volume 1674, Optical/Laser Microlithography V; (1992) https://doi.org/10.1117/12.130332
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

The reasons that imaging is tone-dependent come from two fundamental concepts: the aerial images of complimentary mask patterns for partially coherent projection systems are not complimentary, and the exposure reaction is highly non-linear in the concentration of the soluble species. Complimentary mask patterns are simply patterns of opposite tone. If mp(x) describes a positive mask pattern, then its complimentary mask pattern, mn(x), is given by mn(x) = 1 - ntp(x). For incoherent imaging systems, complimentary mask patterns result in complimentary images; however, partially coherent imaging systems do not produce complimentary images. For a first order exposure reaction, the concentration of the photosensitive species is exponentially related to the exposure energy. However, the dependence of the concentration of developer- soluble species on exposure is different for positive and negative resist systems, resulting in different exposure properties. The net result is lithographic behavior which can vary significantly with resist tone.

Citation Download Citation

Chris A. Mack and James E. Connors "Fundamental differences between positive- and negative-tone imaging", Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); https://doi.org/10.1117/12.130332

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available