Development and first applications of an imaging microscope using the Vulcan x-ray laser

Ronald E. Burge; Michael T. Browne; Pambos S. Charalambous; Gary E. Slark; Paul Smith

doi:10.1117/12.138743

13 January 1993 Development and first applications of an imaging microscope using the Vulcan x-ray laser

Ronald E. Burge, Michael T. Browne, Pambos S. Charalambous, Gary E. Slark, Paul Smith

Proceedings Volume 1741, Soft X-Ray Microscopy; (1993) https://doi.org/10.1117/12.138743
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

An imaging microscope, comprising a Schwarzschild condenser and zone plate optical arrangement, has been established on the Vulcan Nd-glass laser system at the Rutherford Appleton Laboratory (RAL). Images of simple test structures have been taken in x-ray transmission using doublet x-ray laser radiation at 23.2 nm and 23.6 nm from collisionally pumped Ne-like germanium. Image resolutions of about 0.15 micrometers have been measured. The results are intended as a proof of principle and demonstrate both that images can be taken successfully using the Vulcan x-ray laser, and of specimen regions which are destroyed on passage of the x-ray beam.

Citation Download Citation

Ronald E. Burge, Michael T. Browne, Pambos S. Charalambous, Gary E. Slark, and Paul Smith "Development and first applications of an imaging microscope using the Vulcan x-ray laser", Proc. SPIE 1741, Soft X-Ray Microscopy, (13 January 1993); https://doi.org/10.1117/12.138743

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