Micromachining with waveguide excimer lasers

C. Paul Christensen Jr.; Michael T. Duignan; Louis R. Rodriguez

doi:10.1117/12.143036

19 April 1993 Micromachining with waveguide excimer lasers

C. Paul Christensen Jr., Michael T. Duignan, Louis R. Rodriguez

Proceedings Volume 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design; (1993) https://doi.org/10.1117/12.143036
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States

Abstract

Small, high-repetition-rate waveguide excimer lasers enable new approaches to pattern and shape generation by ultraviolet photoablation. Using a tabletop microfabrication system that integrates a waveguide excimer laser with vision and motion control systems, we have generated three dimensional structures through direct-write photoablation of polyimide substrates.

Citation Download Citation

C. Paul Christensen Jr., Michael T. Duignan, and Louis R. Rodriguez "Micromachining with waveguide excimer lasers", Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); https://doi.org/10.1117/12.143036

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