Implementation of phase-stepping interferometry to transmitted-light DIC microscopy for dielectric surface evaluation

Malgorzata Sochacka; Franck Le Provost

doi:10.1117/12.171878

3 May 1994 Implementation of phase-stepping interferometry to transmitted-light DIC microscopy for dielectric surface evaluation

Malgorzata Sochacka, Franck Le Provost

Author Affiliations +

Proceedings Volume 1846, Phase Contrast and Differential Interference Contrast Imaging Techniques and Applications; (1994) https://doi.org/10.1117/12.171878
Event: Phase Contrast and Differential Interference Contrast Imaging Techniques and Applications, 1992, Warsaw, Poland

Abstract

The phase stepping technique with dia illumination is proposed to evaluate surface relief of dielectric layers. An easy implementation is described in a commercially available polarized light interference microscope and experimental results are presented.

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Malgorzata Sochacka and Franck Le Provost "Implementation of phase-stepping interferometry to transmitted-light DIC microscopy for dielectric surface evaluation", Proc. SPIE 1846, Phase Contrast and Differential Interference Contrast Imaging Techniques and Applications, (3 May 1994); https://doi.org/10.1117/12.171878

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