248-nm lens materials: performance and durability issues in an industrial environment

Douglas J. Krajnovich; Iraj K. Pour; Andrew C. Tam; Wing P. Leung; Murli V. Kulkarni

doi:10.1117/12.147422

24 June 1993 248-nm lens materials: performance and durability issues in an industrial environment

Douglas J. Krajnovich, Iraj K. Pour, Andrew C. Tam, Wing P. Leung, Murli V. Kulkarni

Proceedings Volume 1848, 24th Annual Boulder Damage Symposium Proceedings -- Laser-Induced Damage in Optical Materials: 1992; (1993) https://doi.org/10.1117/12.147422
Event: Optical Materials for High Power Lasers, 1992, Boulder, CO, United States

Abstract

The short wavelengths and high peak powers of rare gas-halide excimer lasers suggest many uses in industry. To exploit these opportunities, lasers must be developed that can operate reliably and economically at high repetition rates and high pulse energies, and optics must be fabricated that can withstand hundreds of millions or billions of laser shots without degradation. On the laser front, rapid progress is being made by several manufacturers. This talk focuses on the optics, in particular, transmissive optical materials for KrF laser applications. A variety of synthetic fused silicas were tested in front of an industrial KrF laser at high repetition rate (300 Hz) and moderate fluence (500 mJ/cm²). All samples develop a characteristic absorption band at 210 nm in the early stages of the exposure. The absorption relaxes gradually after the laser is turned off. In almost every sample, this gradual behavior is followed by a large and sudden increase in the 248 nm absorption (up to 12% per cm). The nature, consequences, and possible causes of this `strong absorption transition' are discussed. Some data on high-purity single-crystal CaF₂ is included for comparison.

Citation Download Citation

Douglas J. Krajnovich, Iraj K. Pour, Andrew C. Tam, Wing P. Leung, and Murli V. Kulkarni "248-nm lens materials: performance and durability issues in an industrial environment", Proc. SPIE 1848, 24th Annual Boulder Damage Symposium Proceedings -- Laser-Induced Damage in Optical Materials: 1992, (24 June 1993); https://doi.org/10.1117/12.147422

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available