Phase plates in the object plane for microlithography

David Levenson

doi:10.1117/12.154478

1 May 1993 Phase plates in the object plane for microlithography

David Levenson

Proceedings Volume 1870, Laser Coherence Control: Technology and Applications; (1993) https://doi.org/10.1117/12.154478
Event: OE/LASE'93: Optics, Electro-Optics, and Laser Applications in Scienceand Engineering, 1993, Los Angeles, CA, United States

Abstract

Phase-shifting masks, which have many similarities to the phase plates used to smooth laser beams, are being developed to project high-contrast patterns for semiconductor manufacturing.

Citation Download Citation

David Levenson "Phase plates in the object plane for microlithography", Proc. SPIE 1870, Laser Coherence Control: Technology and Applications, (1 May 1993); https://doi.org/10.1117/12.154478

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