Observation of deep holes using new technique

Fumio Mizuno; Satoru Yamada; Akihiro Miura; Hideo Todokoro

doi:10.1117/12.148954

4 August 1993 Observation of deep holes using new technique

Fumio Mizuno, Satoru Yamada, Akihiro Miura, Hideo Todokoro

Proceedings Volume 1926, Integrated Circuit Metrology, Inspection, and Process Control VII; (1993) https://doi.org/10.1117/12.148954
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

We discovered the phenomena in scanning electron microscopy that the bottom of deep holes can be observed clearly when a high energy electron beam is irradiated. In order to utilize this phenomena, we developed a novel instrument that generates a scanning electron probe of 50 to 200 keV with TV-scan rate that enables us to inspect maximum 8 inches diameter wafers. In the past, we could inspect deep holes by observing cross sectional view of a hole milled with a focused ion beam (FIB). Using the novel instrument, we can easily inspect such holes without destroying samples. This observation does not depend on the specimen conditions, such as aspect ratio of holes and specimen charging that often occurs in the case of observing insulators. This instrument enables us to observe inside structures of semiconductor devices. Irradiation damage on semiconductor devices, such as threshold voltage and sub-threshold coefficient deviation of MOS transistors can be recovered, except for the irradiated area by means of hydrogen annealing of 30 minutes with temperature of 450 degree(s)C.

Citation Download Citation

Fumio Mizuno, Satoru Yamada, Akihiro Miura, and Hideo Todokoro "Observation of deep holes using new technique", Proc. SPIE 1926, Integrated Circuit Metrology, Inspection, and Process Control VII, (4 August 1993); https://doi.org/10.1117/12.148954

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available