Soft x-ray spectrometer for in situ monitoring of thin-film growth

Per Skytt; Carl J. Englund; Nial Wassdahl; Derrick C. Mancini; Joseph Nordgren

doi:10.1117/12.193191

7 November 1994 Soft x-ray spectrometer for in situ monitoring of thin-film growth

Per Skytt, Carl J. Englund, Nial Wassdahl, Derrick C. Mancini, Joseph Nordgren

Proceedings Volume 2283, X-Ray and Ultraviolet Spectroscopy and Polarimetry; (1994) https://doi.org/10.1117/12.193191
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

We have designed and constructed a compact spectrometer dedicated to in-situ characterization of thin films during deposition, using soft x-ray emission spectroscopy. It consists of a Rowland-circle mounted spherical grating and entrance slit, or slit array to enhance throughput. A 2D position-sensitive detector (microchannel plate stack and resistive anode) is mounted tangent to the image of the slit(s) on the Rowland circle. The instrument covers an energy range of 240 - 700 eV using a 300 1/mm grating in the first order. Thus, the spectrometer simultaneously records K emission for low-Z elements C through F, while L emission for 3D metals can be recorded in first or higher orders. The resolution is approximately 300, allowing chemical analysis. Both detector and grating are housed in a vacuum chamber that is turbomolecularly pumped to a pressure below 10^-6 Torr. The instrument can be attached to any process chamber using a standard UHV flange. The slit extends into the process chamber separated from the housing by a valve. This valve can be closed, or in one of two open positions where thin foils serve as vacuum windows to protect the detector and grating, and as filters to reduce background counts from UV light. The spectrometer has successfully monitored a variety of processes in situ, including growth of optical TiN films by reactive magnetron sputter deposition, synchrotron radiation induced CVD of metallic films, and hot-filament CVD growth of diamond.

Citation Download Citation

Per Skytt, Carl J. Englund, Nial Wassdahl, Derrick C. Mancini, and Joseph Nordgren "Soft x-ray spectrometer for in situ monitoring of thin-film growth", Proc. SPIE 2283, X-Ray and Ultraviolet Spectroscopy and Polarimetry, (7 November 1994); https://doi.org/10.1117/12.193191

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available