Photocurrent imaging of silicon wafers using electrolyte contacts

Thomas Falter; Dietmar Hellmann; Peter Eichinger

doi:10.1117/12.186635

14 September 1994 Photocurrent imaging of silicon wafers using electrolyte contacts

Thomas Falter, Dietmar Hellmann, Peter Eichinger

Proceedings Volume 2337, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing; (1994) https://doi.org/10.1117/12.186635
Event: Microelectronic Manufacturing, 1994, Austin, TX, United States

Abstract

The photocurrent response of Silicon wafers scanned by laser beams of variable wavelength and intensity is evaluated to assess process-induced defects in their lateral and in-depth distribution, as well as in their chemical nature. Large-area transparent contacts to bare wafers, for current collection and surface passivation, are made by electrolyte chambers (ELYMAT principle). The application of the analytical technique is discussed for a variety of process development tasks, among them evaluation of quartz quality impact on bulk minority carrier lifetime and surface-near defect formation, intrinsic gettering and DZ characterization, as well as oxide interface quality.

Citation Download Citation

Thomas Falter, Dietmar Hellmann, and Peter Eichinger "Photocurrent imaging of silicon wafers using electrolyte contacts", Proc. SPIE 2337, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing, (14 September 1994); https://doi.org/10.1117/12.186635

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available