Laser Annealing Of Semiconductors

M. Bertolotti; G. Vitali

doi:10.1117/12.959053

15 May 1981 Laser Annealing Of Semiconductors

M. Bertolotti, G. Vitali

Proceedings Volume 0236, 1980 European Conf on Optical Systems and Applications; (1981) https://doi.org/10.1117/12.959053
Event: 1980 European Conference on Optical Systems and Applications, 1980, Utrecht, Netherlands

Abstract

General aspects of laser annealing of semiconductors are discussed.

Citation Download Citation

M. Bertolotti and G. Vitali "Laser Annealing Of Semiconductors", Proc. SPIE 0236, 1980 European Conf on Optical Systems and Applications, (15 May 1981); https://doi.org/10.1117/12.959053

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