Epitaxial growth of optical LiTaO3 and LiNbO3 waveguide film by pulsed-laser deposition

Junming Liu; Zhiguo Liu; Shining Zhu; Zhuangchun Wu; Ming-Sheng Zhang; Duan Feng

doi:10.1117/12.190783

26 October 1994 Epitaxial growth of optical LiTaO₃ and LiNbO₃ waveguide film by pulsed-laser deposition

Junming Liu, Zhiguo Liu, Shining Zhu, Zhuangchun Wu, Ming-Sheng Zhang, Duan Feng

Proceedings Volume 2364, Second International Conference on Thin Film Physics and Applications; (1994) https://doi.org/10.1117/12.190783
Event: Thin Film Physics and Applications: Second International Conference, 1994, Shanghai, China

Abstract

The waveguiding epitaxial LiTaO₃ and LiNbO₃ films have been prepared on sapphire substrates by pulsed laser deposition technique. The as-grown films were characterized by Raman scattering, XRD and SEM techniques, which revealed that epitaxial LiTaO₃ and LiNbO₃ films with small roughness were achieved on (001) and (012) sapphire substrates, respectively. Optical waveguiding properties were demonstrated by m-line measurement of TM and TE modes.

Citation Download Citation

Junming Liu, Zhiguo Liu, Shining Zhu, Zhuangchun Wu, Ming-Sheng Zhang, and Duan Feng "Epitaxial growth of optical LiTaO₃ and LiNbO₃ waveguide film by pulsed-laser deposition", Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); https://doi.org/10.1117/12.190783

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