Paper
26 September 1995 Fabrication and testing of microchannel heat exchangers
Judith M. Cuta, Wendy D. Bennett, Carolyn Evans McDonald, T. S. Ravigururajan
Author Affiliations +
Proceedings Volume 2640, Microlithography and Metrology in Micromachining; (1995) https://doi.org/10.1117/12.222642
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States
Abstract
Micro-channel heat-exchanger test articles were fabricated and performance tested. The heat exchangers are being developed for innovative applications, and have been shown to be capable of handling heat loads of up to 100 W/cm2. The test articles were fabricated to represent two different designs for the micro-channel portion of the heat exchanger. One design consists of 166 micro-channels etched in silicon substrate, and a second design consists of 54 micro-channels machined in copper substrate. The devices were tested in an experimental loop designed for performance testing in single- and two-phase flow with water and R124. Pressure and liquid subcooling can be regulated over the range of interest, and a secondary heat removal loop provides stable loop performance for steady-state tests. The selected operating pressures are approximately 0.344 MPa for distilled water and 0.689 MPa for R124. The temperature ranges are 15.5 to 138 C for distilled water and 15.5 to 46 C for R-124. The mass flow range 7.6 X 10-8 to 7.6 X 10MIN5 kg/min for both distilled water and R124.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Judith M. Cuta, Wendy D. Bennett, Carolyn Evans McDonald, and T. S. Ravigururajan "Fabrication and testing of microchannel heat exchangers", Proc. SPIE 2640, Microlithography and Metrology in Micromachining, (26 September 1995); https://doi.org/10.1117/12.222642
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Cited by 12 scholarly publications.
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KEYWORDS
Silicon

Metals

Temperature metrology

Microfluidics

Copper

Water

Semiconducting wafers

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