Design, fabrication, and characterization of electrostatic microrelays

Shuvo Roy; Mehran Mehregany

doi:10.1117/12.221184

15 September 1995 Design, fabrication, and characterization of electrostatic microrelays

Shuvo Roy, Mehran Mehregany

Proceedings Volume 2642, Micromachined Devices and Components; (1995) https://doi.org/10.1117/12.221184
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

This paper describes the development of electrostatically-actuated nickel microrelays. Device design is based on lateral comb-finger drives for actuation of the relay contact. The contact geometry is intended to reduce the 'ON' resistance and also prevent spontaneous closing of the relay. Planar microrelays, up to 15 micrometers thick, are batch fabricated using nickel surface micromachining which uses electroless plated nickel as the structural material, high-aspect- ratio positive resist lithography for the plating mold, and polysilicon as the sacrificial layer. The microfabricated relays were successfully actuated to investigate electrical contact attributes. Initial experiments reveal contact resistances to be around 15(Omega) and current densities up to 2mA/micrometers ² without degradation.

Citation Download Citation

Shuvo Roy and Mehran Mehregany "Design, fabrication, and characterization of electrostatic microrelays", Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); https://doi.org/10.1117/12.221184

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