Three-dimensional polymeric and ceramic MEMS and their applications

Vijay K. Varadan; Vasundara V. Varadan; S. Motojima

doi:10.1117/12.240440

20 May 1996 Three-dimensional polymeric and ceramic MEMS and their applications

Vijay K. Varadan, Vasundara V. Varadan, S. Motojima

Proceedings Volume 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS; (1996) https://doi.org/10.1117/12.240440
Event: 1996 Symposium on Smart Structures and Materials, 1996, San Diego, CA, United States

Abstract

In this paper, polymeric 3D MEMS fabricated from UV curable conductive polymer by stereo lithography and ceramic 3D MEMS fabricated by CVD processes are presented. Particular attention is given to the fabrication of micro coil springs of moderate and high aspect ratios. Applications of such devices include drag control in aircraft, beam focusing and steering and electromagnetic shielding and absorption.

Citation Download Citation

Vijay K. Varadan, Vasundara V. Varadan, and S. Motojima "Three-dimensional polymeric and ceramic MEMS and their applications", Proc. SPIE 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS, (20 May 1996); https://doi.org/10.1117/12.240440

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