Lithography applications of the new Tencor Surfscan AIT laser-based defect inspection system

Ian Preston Lincoln; Rebecca S. Howland; Keith B. Wells

doi:10.1117/12.240123

21 May 1996 Lithography applications of the new Tencor Surfscan AIT laser-based defect inspection system

Ian Preston Lincoln, Rebecca S. Howland, Keith B. Wells

Proceedings Volume 2725, Metrology, Inspection, and Process Control for Microlithography X; (1996) https://doi.org/10.1117/12.240123
Event: SPIE's 1996 International Symposium on Microlithography, 1996, Santa Clara, CA, United States

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Ian Preston Lincoln, Rebecca S. Howland, and Keith B. Wells "Lithography applications of the new Tencor Surfscan AIT laser-based defect inspection system", Proc. SPIE 2725, Metrology, Inspection, and Process Control for Microlithography X, (21 May 1996); https://doi.org/10.1117/12.240123

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