Characterization of poly(phenylsilsequioxane) for planar integrated optical waveguide applications

Kolin S. Brown; B. J. Taylor; Lawrence Anthony Hornak; T. W. Weidman

doi:10.1117/12.271084

4 April 1997 Characterization of poly(phenylsilsequioxane) for planar integrated optical waveguide applications

Kolin S. Brown, B. J. Taylor, Lawrence Anthony Hornak, T. W. Weidman

Proceedings Volume 3005, Optoelectronic Interconnects and Packaging IV; (1997) https://doi.org/10.1117/12.271084
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

Our research characterized the fundamental optical properties of poly(phenylsilsequioxane) (PPSQ) planar waveguides in an effort to determine the material's suitability as a guided wave optical interconnect in polymer. Material characterization included determining the refractive index, mode structure, and optical losses of 1-2 micrometers PPSQ films. Optical loss measurements indicate that PPSQ planar waveguides have a propagation loss of 0.17 dB/cm at 632.8 nm for first order TE modes in thin films between 1.72 micrometers and 1.32 micrometers . The silicon backbone polymer is experimentally shown to be thermally stable for temperatures up to 400 degree C, with no apparent change in index of refraction, volume, or optical loss. Experimental results indicate that the material is compatible with standard microelectronic fabrication and a strong candidate for use in optical waveguide applications.

Citation Download Citation

Kolin S. Brown, B. J. Taylor, Lawrence Anthony Hornak, and T. W. Weidman "Characterization of poly(phenylsilsequioxane) for planar integrated optical waveguide applications", Proc. SPIE 3005, Optoelectronic Interconnects and Packaging IV, (4 April 1997); https://doi.org/10.1117/12.271084

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