Applications and use of in-situ chemical sensors in semiconductor manufacturing

Donald L. Tolliver; George H. Atkinson

doi:10.1117/12.280920

23 July 1997 Applications and use of in-situ chemical sensors in semiconductor manufacturing

Donald L. Tolliver, George H. Atkinson

Proceedings Volume 3082, Electro-Optical Technology for Remote Chemical Detection and Identification II; (1997) https://doi.org/10.1117/12.280920
Event: AeroSense '97, 1997, Orlando, FL, United States

Abstract

The use of in-situ chemical sensors in semiconductor wafer fabrication will increase significantly over the next five years. Advanced gas phase and liquid phase real time, non contaminating chemical sensors will be applied in four major categories of use. These four areas of application are: (1) Upstream measurements of trace contaminants in high purity process gases and liquids. (2) In-the-chamber or in-the- process bath measurements of chemical species of on line active process tools. (3) Real time, on line, downstream measurements of gas phase and liquid phase effluents coming from semiconductor wafer process tools. (4) Semiconductor industrial hygiene and safety monitors for toxic substances in the work place. This paper will review each of these major applications for both gases and liquids as they will need to be integrated into semiconductor wafer manufacturing over time. Some existing sensor applications currently exist. This review will focus extensively on in-situ real time chemical monitoring sensors.

Citation Download Citation

Donald L. Tolliver and George H. Atkinson "Applications and use of in-situ chemical sensors in semiconductor manufacturing", Proc. SPIE 3082, Electro-Optical Technology for Remote Chemical Detection and Identification II, (23 July 1997); https://doi.org/10.1117/12.280920

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available