Frequency analysis for roughness of optical surface by focal plane CCD camera

Jianbai Li; Aihan Ying; Xiaoyun Li; Xiaolin Zhang; Anqing Zao

doi:10.1117/12.287739

25 September 1997 Frequency analysis for roughness of optical surface by focal plane CCD camera

Jianbai Li, Aihan Ying, Xiaoyun Li, Xiaolin Zhang, Anqing Zao

Proceedings Volume 3100, Sensors, Sensor Systems, and Sensor Data Processing; (1997) https://doi.org/10.1117/12.287739
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

In this paper, the new method on evaluating and measuring roughness of optical surface by Fourier spatial frequency analysis is presented. Authors have gotten the equipment, in which the electron photomicrographs of optical surface is scanned and analyzed by CCD camera--microcomputer system. The new method have both good virtual and lateral resolution, fast scanning speed and better measuring accuracy.

Citation Download Citation

Jianbai Li, Aihan Ying, Xiaoyun Li, Xiaolin Zhang, and Anqing Zao "Frequency analysis for roughness of optical surface by focal plane CCD camera", Proc. SPIE 3100, Sensors, Sensor Systems, and Sensor Data Processing, (25 September 1997); https://doi.org/10.1117/12.287739

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