Infrared micromachined Fabry-Perot interferometer

Cazimir-Gabriel Bostan; A. Corici; S. Nan; P. Obreja

doi:10.1117/12.281347

22 September 1997 Infrared micromachined Fabry-Perot interferometer

Cazimir-Gabriel Bostan, A. Corici, S. Nan, P. Obreja

Proceedings Volume 3110, 10th Meeting on Optical Engineering in Israel; (1997) https://doi.org/10.1117/12.281347
Event: 10th Meeting on Optical Engineering in Israel, 1997, Jerusalem, Israel

Abstract

In this paper a Fabry-Perot interferometer fabricated by silicon surface micromachining is presented. The interferometer can be optimized for a wavelength of 1.3 micrometer, to act as an electro-mechanical modulator for fiber-optic network communications (fiber-in-the-loop applications), or for a range of wavelength from 1.5 - 7.5 micrometer, to act as a filter for IR spectroscopy in an IR gas analyzer.

Citation Download Citation

Cazimir-Gabriel Bostan, A. Corici, S. Nan, and P. Obreja "Infrared micromachined Fabry-Perot interferometer", Proc. SPIE 3110, 10th Meeting on Optical Engineering in Israel, (22 September 1997); https://doi.org/10.1117/12.281347

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