Design and fabrication of wireless remotely readable MEMS accelerometers

Vijay K. Varadan; Hareesh Subramanian; Vasundara V. Varadan

doi:10.1117/12.293537

14 November 1997 Design and fabrication of wireless remotely readable MEMS accelerometers

Vijay K. Varadan, Hareesh Subramanian, Vasundara V. Varadan

Proceedings Volume 3242, Smart Electronics and MEMS; (1997) https://doi.org/10.1117/12.293537
Event: Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS, 1997, Adelaide, Australia

Abstract

The integration of MEMS, SAW devices and required microelectronics and conformal antenna to realize a programmable wireless accelerometer is presented in this paper. This unique combination of technologies results in a novel accelerometer that can be remotely sensed by a microwave system with the advantage of no power requirements at the sensor site. The microaccelerometer presented is simple in construction and easy to manufacture with existing silicon micromachining techniques. The relatively small size of the sensor makes it an ideal conformal sensor. The accelerometer finds application as air bag deployment sensors, vibration sensors for noise control, deflection and strain sensors, inertial and dimensional positioning systems, ABS/traction control, smart suspension, active roll stabilization and four wheel steering. The wireless accelerometer is very attractive to study the response of a 'dummy' in automobile crash test.

Citation Download Citation

Vijay K. Varadan, Hareesh Subramanian, and Vasundara V. Varadan "Design and fabrication of wireless remotely readable MEMS accelerometers", Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); https://doi.org/10.1117/12.293537

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available