Surface properties of polyimide layers used in microelectronics

Jerzy Borycki; Malgorzata Okulska-Bozek

doi:10.1117/12.301302

1 January 1998 Surface properties of polyimide layers used in microelectronics

Jerzy Borycki, Malgorzata Okulska-Bozek

Proceedings Volume 3319, Liquid Crystals: Chemistry and Structure; (1998) https://doi.org/10.1117/12.301302
Event: Liquid Crystals, 1997, Zakopane, Poland

Abstract

Dozens of poly(amic acids) from selected aromatic diamines and dianhydrides were prepared in the first step of the classical two-step polycondensation. Polyimide layers on different surfaces were obtained by the poly(amic acids) imidization. Some of mechanical properties of these layers were tested. Some correlations between these properties and chemical structure of them wee noticed and discussed.

Citation Download Citation

Jerzy Borycki and Malgorzata Okulska-Bozek "Surface properties of polyimide layers used in microelectronics", Proc. SPIE 3319, Liquid Crystals: Chemistry and Structure, (1 January 1998); https://doi.org/10.1117/12.301302

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