Metal Oxide Semiconductor (MOS) Technology Scaling Issues And Their Relation To Submicron Lithography

Al F. Tasch Jr.

doi:10.1117/12.933414

30 June 1982 Metal Oxide Semiconductor (MOS) Technology Scaling Issues And Their Relation To Submicron Lithography

Al F. Tasch Jr.

Proceedings Volume 0333, Submicron Lithography I; (1982) https://doi.org/10.1117/12.933414
Event: 1982 Microlithography Conferences, 1982, Santa Clara, United States

Abstract

This paper examines the impact of submicron MOS integrated circuit technology on submicron lithography, and contrasts the lithography picture today with that for submicron features. A considerably larger number of factors must be dealt with rigorously because they either do not scale with decreasing dimensions or they do not lend themselves easily to more rigid control so that it has become disproportionately difficult to reduce their effect. In addition to the lithography issues, other serious device technology limitations arise at submicron dimensions. These have to do with device isolation, gate insulation, parasitic resistance and capacitance, interconnectivity, particle-induced upset, and hot electron effects. These issues must also be successfully resolved if submicron dimensions are to be successfully exploited in submicron integrated circuits.

Citation Download Citation

Al F. Tasch Jr. "Metal Oxide Semiconductor (MOS) Technology Scaling Issues And Their Relation To Submicron Lithography", Proc. SPIE 0333, Submicron Lithography I, (30 June 1982); https://doi.org/10.1117/12.933414

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available