Sinusoidal wavelength-scanning interferometers

Osami Sasaki; Kenichiro Tsuji; Shouichi Sato; Tomokazu Kuwahara; Takamasa Suzuki

doi:10.1117/12.312959

30 June 1998 Sinusoidal wavelength-scanning interferometers

Osami Sasaki, Kenichiro Tsuji, Shouichi Sato, Tomokazu Kuwahara, Takamasa Suzuki

Proceedings Volume 3478, Laser Interferometry IX: Techniques and Analysis; (1998) https://doi.org/10.1117/12.312959
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

In sinusoidal phase-modulating interferometry an optical path length (OPD) larger than a wavelength is measured by detecting sinusoidal phase-modulation amplitude of the interference signal. This interference signal is produced by scanning sinusoidally wavelength of a light source. If the measurement accuracy in POD is higher than half of the central wavelength, this measured value is combined with a fractional value of the OPD which is obtained from the conventional phase of the interference signal. The measurement accuracy in POD is higher as the scanning width of wavelength is larger. We propose two different methods to create a light source with a large scanning width of wavelength by using superluminenscent laser diode and external-cavity tunable laser diode. Experimental results clearly show that sinusoidal wavelength-scanning interferometers using these light sources measure an OPD over a few tens of microns with a high accuracy of a few nm.

Citation Download Citation

Osami Sasaki, Kenichiro Tsuji, Shouichi Sato, Tomokazu Kuwahara, and Takamasa Suzuki "Sinusoidal wavelength-scanning interferometers", Proc. SPIE 3478, Laser Interferometry IX: Techniques and Analysis, (30 June 1998); https://doi.org/10.1117/12.312959

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