Foundry technology trend

Jack Y. C. Sun

doi:10.1117/12.324346

3 September 1998 Foundry technology trend

Jack Y. C. Sun

Proceedings Volume 3507, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV; (1998) https://doi.org/10.1117/12.324346
Event: Microelectronic Manufacturing, 1998, Santa Clara, CA, United States

Abstract

This paper gives an overview of the foundry technology trend in the future. The foundry model is a part of the natural trend toward the vertical disintegration of the semiconductor industry. Foundry technology is already in the lading pack, and will be on the leading edge from now on. Foundry technology will be market driven toward low voltage, low power, high performance, high density, and system on chip. Examples of leading-edge 0.25 um logic and 0.18 micrometers and beyond process features will be used to illustrate this trend.

Citation Download Citation

Jack Y. C. Sun "Foundry technology trend", Proc. SPIE 3507, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV, (3 September 1998); https://doi.org/10.1117/12.324346

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Logic

Manufacturing

Semiconductors

Signal processing

System on a chip

Transistors

Standards development

Show All Keywords

Keywords/Phrases

Search In:

Publication Years