Antistiction coatings for surface micromachines

Roya Maboudian

doi:10.1117/12.324288

31 August 1998 Antistiction coatings for surface micromachines

Roya Maboudian

Proceedings Volume 3511, Micromachining and Microfabrication Process Technology IV; (1998) https://doi.org/10.1117/12.324288
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

Adhesion, friction, and wear are prevalent problems in a majority of MEMS devices. Understanding of surface interactions in MEMS is of paramount importance for controlling stiction phenomena. This paper will discuss various surface treatments employed to reduce adhesion and friction in polysilicon-based MEMS, their successes and their limitations.

Citation Download Citation

Roya Maboudian "Antistiction coatings for surface micromachines", Proc. SPIE 3511, Micromachining and Microfabrication Process Technology IV, (31 August 1998); https://doi.org/10.1117/12.324288

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