Excimer laser deep microstructuring for LIGA process

Beijun Shen; Runwen Wang; Dunwu Lu; Huijie Huang; Longlong Du

doi:10.1117/12.317927

15 August 1998 Excimer laser deep microstructuring for LIGA process

Beijun Shen, Runwen Wang, Dunwu Lu, Huijie Huang, Longlong Du

Proceedings Volume 3550, Laser Processing of Materials and Industrial Applications II; (1998) https://doi.org/10.1117/12.317927
Event: Photonics China '98, 1998, Beijing, China

Abstract

LIGA process technique is a three-dimensional micromachining technology which is applied to fabricate 3D micromechanical parts. Because the LIGA process requires synchrotron radiation for deep-etch X-ray lithography, few can utilized this technique. In order to solve this problem, many efforts have been made in the world. In Shanghai Institute of Optics and Fine Mechanics, an evolutionary process named Laser LIGA process is being developed. The recent progresses in the development of this process is reported. The mechanism of UV laser ablation, the design of experiment apparatus and the experiment procedures for fabrication of micromechanical parts are introduced. In the end of the paper the experiment result is presented, which is a (phi) 500 micrometer micro-gear of 220 micrometer depth.

Citation Download Citation

Beijun Shen, Runwen Wang, Dunwu Lu, Huijie Huang, and Longlong Du "Excimer laser deep microstructuring for LIGA process", Proc. SPIE 3550, Laser Processing of Materials and Industrial Applications II, (15 August 1998); https://doi.org/10.1117/12.317927

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