Optical correlation technique for measurement of roughness at microfacets of reflection-type diffraction gratings

Oleg V. Angelsky; Peter P. Maksimyak

doi:10.1117/12.321020

19 August 1998 Optical correlation technique for measurement of roughness at microfacets of reflection-type diffraction gratings

Oleg V. Angelsky, Peter P. Maksimyak

Author Affiliations +

Proceedings Volume 3573, OPTIKA '98: 5th Congress on Modern Optics; (1998) https://doi.org/10.1117/12.321020
Event: OPTIKA '98: Fifth Congress on Modern Optics, 1998, Budapest, Hungary

Abstract

Physical principles and techniques the noncontact interference method for rough microfacets surface diagnostics are discussed. Measuring of roughness at different facets we obtained the values of R_q within the range from 0.005 to 0.05 micrometers.

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Oleg V. Angelsky and Peter P. Maksimyak "Optical correlation technique for measurement of roughness at microfacets of reflection-type diffraction gratings", Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); https://doi.org/10.1117/12.321020

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