Two-input axis angular rate sensor

Seungdo An; K.Y. Park; Yong-Soo Oh; Ci Moo Song

doi:10.1117/12.354272

20 July 1999 Two-input axis angular rate sensor

Seungdo An, K.Y. Park, Yong-Soo Oh, Ci Moo Song

Proceedings Volume 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS; (1999) https://doi.org/10.1117/12.354272
Event: 1999 Symposium on Smart Structures and Materials, 1999, Newport Beach, CA, United States

Abstract

The surface micromachining process realized the dual-axis micro gyroscope. The 7.5 um-thick polysilicon layer deposited by LPCVD is used for the resonating structure. In this research, we report a new angularly actuated structure which detects the two-input angular rates simultaneously. One-chip is cheaper and smaller than using two gyro chips orthogonally-configured for the detection of two-input axis angular rate.

Citation Download Citation

Seungdo An, K.Y. Park, Yong-Soo Oh, and Ci Moo Song "Two-input axis angular rate sensor", Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); https://doi.org/10.1117/12.354272

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