Finite element modeling of SCALPEL masks

Roxann L. Engelstad; Edward G. Lovell; Gerald A. Dicks; Carl J. Martin; Michael P. Schlax; William H. Semke; James Alexander Liddle; Anthony E. Novembre

doi:10.1117/12.351085

25 June 1999 Finite element modeling of SCALPEL masks

Roxann L. Engelstad, Edward G. Lovell, Gerald A. Dicks, Carl J. Martin, Michael P. Schlax, William H. Semke, James Alexander Liddle, Anthony E. Novembre

Author Affiliations +

Proceedings Volume 3676, Emerging Lithographic Technologies III; (1999) https://doi.org/10.1117/12.351085
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

A virtual mask laboratory has been developed at the UW Computational Mechanics Center to aid in the design and optimization of the SCALPEL mask. Finite element models have been generated to simulate the thermomechanical response of the mask during fabrication, pattern transfer, mounting and exposure. Results on the mask-related distortions can be used to assess image placement accuracy and mask stability; examples of accurate procedures to vectorially sum in-plane distortion maps from the various sources are presented. In addition, experimental methods to provide material properties and stress characterization data are outlined, along with techniques to verify and benchmark the mechanical models.

Citation Download Citation

Roxann L. Engelstad, Edward G. Lovell, Gerald A. Dicks, Carl J. Martin, Michael P. Schlax, William H. Semke, James Alexander Liddle, and Anthony E. Novembre "Finite element modeling of SCALPEL masks", Proc. SPIE 3676, Emerging Lithographic Technologies III, (25 June 1999); https://doi.org/10.1117/12.351085

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