Impact of mask errors on full chip error budgets

Franklin M. Schellenberg; Victor V. Boksha; Nicolas B. Cobb; J. C. Lai; C. H. Chen; Chris A. Mack

doi:10.1117/12.354339

26 July 1999 Impact of mask errors on full chip error budgets

Franklin M. Schellenberg, Victor V. Boksha, Nicolas B. Cobb, J. C. Lai, C. H. Chen, Chris A. Mack

Proceedings Volume 3679, Optical Microlithography XII; (1999) https://doi.org/10.1117/12.354339
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

As lithography pushes to smaller and smaller features under the guidance of Moore's Law, patterned features smaller than the wavelength of light must be routinely manufactured. Lithographic yield in this domain is directly improved with the application of OPC to the pattern data. However, such corrections generally assume that the reticle can reproduce the benefits of OPC in some circumstances. In this paper, we present the characterization of the MEEF for contact holes. These are found to have significantly higher values for the MEEF than typically measured for isolated lines. Theoretical predictions are compared with experimental results. Good agreement is found at the center of the field only when the actual area of the contact hole as formed on the reticle is used as the metric of contact size. Across field variation, however, is found to be significant requires characterization for optimum yield to be achieved.

Citation Download Citation

Franklin M. Schellenberg, Victor V. Boksha, Nicolas B. Cobb, J. C. Lai, C. H. Chen, and Chris A. Mack "Impact of mask errors on full chip error budgets", Proc. SPIE 3679, Optical Microlithography XII, (26 July 1999); https://doi.org/10.1117/12.354339

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available