Active micromirror: a new adaptive optical microcomponent

Gilles Robert; A. Coville; L. Babadjian; Serge Spirkovitch

doi:10.1117/12.354879

19 July 1999 Active micromirror: a new adaptive optical microcomponent

Gilles Robert, A. Coville, L. Babadjian, Serge Spirkovitch

Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.354879
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States

Abstract

The AMM is a new kind of micromachined deformable mirror. It is a silicon mirror which can be electrostatically actuated by electrodes located on each side of the mirror. In this article we describe the characteristics and the results of modelization and testing of our deformable micro mirror.

Citation Download Citation

Gilles Robert, A. Coville, L. Babadjian, and Serge Spirkovitch "Active micromirror: a new adaptive optical microcomponent", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.354879

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