Synchronously working micromirrors for beam steering: design and application aspects

Steffen Kurth; Kersten Kehr; Jan Mehner; Christian Kaufmann; Ramon Hahn; Ralf Seidel; Wolfram Doetzel; Thomas Gessner

doi:10.1117/12.351657

2 July 1999 Synchronously working micromirrors for beam steering: design and application aspects

Steffen Kurth, Kersten Kehr, Jan Mehner, Christian Kaufmann, Ramon Hahn, Ralf Seidel, Wolfram Doetzel, Thomas Gessner

Proceedings Volume 3787, Optical Scanning: Design and Application; (1999) https://doi.org/10.1117/12.351657
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

A new application of synchronously working micromachined silicon mirrors for a laser beam projection technique producing images on the whole circumference of a cylindrical shaped screen will be discussed within this contribution. The mechanically active mirror area of 12 square millimeters has been divided into 49 single mirrors in order to achieve both fast steering and light power distribution. Diffraction of the laser beam due to the regularly arranged mirrors and its influence to the contrast has been experimentally determined on a small sized projection system. Analytically calculated thermal effects on the mirror shape caused by light power dissipation and heat transfer correspond to the measurements by thermographic imaging and topographic metrology. Investigations concerning phase lag and amplitude difference between the mirrors lead to a design of specially shaped hinges with reduced sensitivity to the main fabrication tolerances.

Citation Download Citation

Steffen Kurth, Kersten Kehr, Jan Mehner, Christian Kaufmann, Ramon Hahn, Ralf Seidel, Wolfram Doetzel, and Thomas Gessner "Synchronously working micromirrors for beam steering: design and application aspects", Proc. SPIE 3787, Optical Scanning: Design and Application, (2 July 1999); https://doi.org/10.1117/12.351657

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