Multidimensional calculation of coupled flow and electrodeposition in microscopic trenches

Chunmei Xia; Jayathi Y. Murthy; Minking K. Chyu; Yao Cheng

doi:10.1117/12.361242

30 August 1999 Multidimensional calculation of coupled flow and electrodeposition in microscopic trenches

Chunmei Xia, Jayathi Y. Murthy, Minking K. Chyu, Yao Cheng

Proceedings Volume 3874, Micromachining and Microfabrication Process Technology V; (1999) https://doi.org/10.1117/12.361242
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

Numerical simulations have been done to delineate transport effects on the electrodeposition of heavy ions in the deep cavities typically fabricated by the LIGA process. Both forced convection and buoyancy-driven natural convection have been considered. Flow patterns and deposition rates have been calculated for a range of electrode reaction rates, forced flow Reynolds numbers, Rayleigh numbers and cavity aspect ratios. The results show that free convection is a significant player in the transport-limited regime, and substantially increases deposition rates, even for modest Rayleigh numbers. For high Rayleigh numbers, the flows are found to be unsteady, and may further increase deposition rates.

Citation Download Citation

Chunmei Xia, Jayathi Y. Murthy, Minking K. Chyu, and Yao Cheng "Multidimensional calculation of coupled flow and electrodeposition in microscopic trenches", Proc. SPIE 3874, Micromachining and Microfabrication Process Technology V, (30 August 1999); https://doi.org/10.1117/12.361242

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