Programmable micro accelerometers and gyroscopes

Vijay K. Varadan; Vasundara V. Varadan

doi:10.1117/12.360484

31 August 1999 Programmable micro accelerometers and gyroscopes

Proceedings Volume 3876, Micromachined Devices and Components V; (1999) https://doi.org/10.1117/12.360484
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

The integration of MEMS, IDTs (Interdigital Transducers) and required microelectronics and conformal antenna to realize a programmable accelerometers and gyroscopes is presented in this paper. This unique combination of technologies results in novel conformal sensors that can be remotely sensed by an RF system with the advantage of no power requirements at the sensor site. Hybrid Programmable accelerometers and gyroscopes on a single chip are useful for inertial navigation systems. Programmable sensors are achieved with splitfinger interdigital transducers (IDTs) as reflecting structures. If IDTs are short-circuited or capacitively loaded, the wave propagates without any reflection whereas in an open circuit configuration, the IDTs reflect the incoming SAW signal. The programmable accelerometers and gyroscopes can thus be achieved by using an external circuitry on a semiconductor chip using hybrid technology.

Citation Download Citation

Vijay K. Varadan and Vasundara V. Varadan "Programmable micro accelerometers and gyroscopes", Proc. SPIE 3876, Micromachined Devices and Components V, (31 August 1999); https://doi.org/10.1117/12.360484

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