Controlled liquid dosing in microinstruments

Marc A. Boillat; Bart van der Schoot; Philippe Arquint; Nico F. de Rooij

doi:10.1117/12.359348

19 August 1999 Controlled liquid dosing in microinstruments

Marc A. Boillat, Bart van der Schoot, Philippe Arquint, Nico F. de Rooij

Proceedings Volume 3877, Microfluidic Devices and Systems II; (1999) https://doi.org/10.1117/12.359348
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

Accurate dosing of liquids in sub-microliter quantities requires a precise measurement of the dispensed quantities. This paper describes applications of a micro flow sensor based on the differential pressure measurement across a fluid restriction. The small size and high accuracy of the flow sensor are very attractive for the integration into sophisticated instrumentation. The use of well-developed hybrid assembly technologies allows for extreme miniaturization and high-density parallel measurements in multi-channel application.

Citation Download Citation

Marc A. Boillat, Bart van der Schoot, Philippe Arquint, and Nico F. de Rooij "Controlled liquid dosing in microinstruments", Proc. SPIE 3877, Microfluidic Devices and Systems II, (19 August 1999); https://doi.org/10.1117/12.359348

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