Combine technique of conducting materials testing at high pressures

Vladimir V. Shchennikov; Andrew Yu. Derevskov; Vladimir I. Osotov

doi:10.1117/12.361316

3 September 1999 Combine technique of conducting materials testing at high pressures

Vladimir V. Shchennikov, Andrew Yu. Derevskov, Vladimir I. Osotov

Proceedings Volume 3882, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V; (1999) https://doi.org/10.1117/12.361316
Event: Microelectronic Manufacturing '99, 1999, Santa Clara, CA, United States

Abstract

The technique of investigations of resistance (rho) , thermoelectric power S, and galvanomagnetic properties of materials by the two-terminal method of measurements under pressure up to 30 GPa is discussed. The combine of stationary and nonstationary regimes of treatment, variation of high pressure chambers with conducting or insulating plungers and using of simultaneous and parallel measurements of various properties are proposed to estimate the parameters of materials under testing. The results of investigations of initial semiconductor and high pressure metal phases of Ge, Te, and molecular solid-Iodine up to 30 GPa at the diamond- plungers apparatus are represented. The technique may be useful for semiconductor fabricated device treatment.

Citation Download Citation

Vladimir V. Shchennikov, Andrew Yu. Derevskov, and Vladimir I. Osotov "Combine technique of conducting materials testing at high pressures", Proc. SPIE 3882, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V, (3 September 1999); https://doi.org/10.1117/12.361316

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available