Phase-locked loop-based microdisplacement/capacitance measurement and control system and its application to MEMS

Shi-Bin Chang; Bruce C. S. Chou; J. J. Chang

doi:10.1117/12.364453

29 September 1999 Phase-locked loop-based microdisplacement/capacitance measurement and control system and its application to MEMS

Shi-Bin Chang, Bruce C. S. Chou, J. J. Chang

Author Affiliations +

Proceedings Volume 3891, Electronics and Structures for MEMS; (1999) https://doi.org/10.1117/12.364453
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

Phase-locked loop (PLL), as well known, is a very popular and cheap tool for pulse generation with almost constant frequency. On the other hand, a user-friendly and cheap tool for micro-displacement/capacitance servo control system still lacks in the market, although it is increasing the need in MEMS industries. In this article, a cheap and stable micro-displacement/capacitance measurement and control system is proposed. Simulations and experimental results show that, if the properties of the electronic components used in the PLL remain close to their nominal values, the proposed system can achieve good capacitance/ displacement measurement and/or servo control accuracy with high resolution. Application examples show that it is very useful in the micro-positioning system and MEMS industries.

Citation Download Citation

Shi-Bin Chang, Bruce C. S. Chou, and J. J. Chang "Phase-locked loop-based microdisplacement/capacitance measurement and control system and its application to MEMS", Proc. SPIE 3891, Electronics and Structures for MEMS, (29 September 1999); https://doi.org/10.1117/12.364453

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