Design and simulation of a micromirror array for a projection TV

Bumkyoo Choi; Junghoon Lee; Kyuwon Jung; Hyungjae Shin

doi:10.1117/12.368449

8 October 1999 Design and simulation of a micromirror array for a projection TV

Bumkyoo Choi, Junghoon Lee, Kyuwon Jung, Hyungjae Shin

Proceedings Volume 3893, Design, Characterization, and Packaging for MEMS and Microelectronics; (1999) https://doi.org/10.1117/12.368449
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

The design of a micromirror for a projection TV is investigated. A static structural analysis is performed to give an optimal shape of the micromirror using the FEM commercial package, ANSYS. A solid modeling is created, and mapped meshes are applied to it in order to satisfy a symmetric condition. A stress analysis shows that maximum stress does not exceed an allowable stress, which is the yield strength. A modal analysis is also executed to find the approximate natural frequencies with different design parameters. The result can be utilized to see which design parameter is strongly dominant. The micromirror was fabricated by Samsung Electronics. Dynamic deflection experiments confirm the results of the simulation.

Citation Download Citation

Bumkyoo Choi, Junghoon Lee, Kyuwon Jung, and Hyungjae Shin "Design and simulation of a micromirror array for a projection TV", Proc. SPIE 3893, Design, Characterization, and Packaging for MEMS and Microelectronics, (8 October 1999); https://doi.org/10.1117/12.368449

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