Is a production-level scanning electron microscope linewidth standard possible?

Michael T. Postek Jr.; Andras E. Vladar; John S. Villarrubia

doi:10.1117/12.386452

2 June 2000 Is a production-level scanning electron microscope linewidth standard possible?

Michael T. Postek Jr., Andras E. Vladar, John S. Villarrubia

Proceedings Volume 3998, Metrology, Inspection, and Process Control for Microlithography XIV; (2000) https://doi.org/10.1117/12.386452
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

Metrology will remain a principal enabler for the development and manufacture of future generations of semiconductor devices. With the potential of 130 nm and 100 nm linewidths and high aspect ratio structures, the scanning electron microscope (SEM) remains an important metrology tool. This instrument is also extensively used in many phases of semiconductor manufacturing throughout the world. A challenge was recently posed in an article in Semiconductor International. That challenge was to have an accurate, production level, linewidth standard for critical dimension scanning electron microscopes available to the semiconductor industry. The potential for meeting this challenge is explored in this paper.

Citation Download Citation

Michael T. Postek Jr., Andras E. Vladar, and John S. Villarrubia "Is a production-level scanning electron microscope linewidth standard possible?", Proc. SPIE 3998, Metrology, Inspection, and Process Control for Microlithography XIV, (2 June 2000); https://doi.org/10.1117/12.386452

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available