Practical software design and experimental research of attenuated phase-shifting masks

Chongxi Zhou; Boru Feng; Desheng Hou; Jin Zhang

doi:10.1117/12.388958

5 July 2000 Practical software design and experimental research of attenuated phase-shifting masks

Chongxi Zhou, Boru Feng, Desheng Hou, Jin Zhang

Proceedings Volume 4000, Optical Microlithography XIII; (2000) https://doi.org/10.1117/12.388958
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

Aerial images of a 0.35micrometers contact hole with the different phase shifting masks are calculated based on Hopkins model, and the optimal parameters of different phase shifters are gotten. Attenuated PSM in enhancing resolution and improving the depth of focus is of the most among them, especially when partial coherence factor is smaller. The calculated and simulated software is programmed. The software could produce all kinds masks automatically and calculate the aerial images at different illumination parameters, numeric aperture (NA), defocus conditions and add optimal phase shifter at these areas where resolution is smaller than the critical dimension (CD). At last, it could transform process old CIF format data file which is used to control E-beam exposure tool and filter it into two files by some sifting rule. The Att-PSMs is made and exposure experiments are carried out.

Citation Download Citation

Chongxi Zhou, Boru Feng, Desheng Hou, and Jin Zhang "Practical software design and experimental research of attenuated phase-shifting masks", Proc. SPIE 4000, Optical Microlithography XIII, (5 July 2000); https://doi.org/10.1117/12.388958

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available