Dynamic checking improves MEMS design methodology

Xavi Marin; Jordi Carrabina; Joan Bausells

doi:10.1117/12.382310

10 April 2000 Dynamic checking improves MEMS design methodology

Xavi Marin, Jordi Carrabina, Joan Bausells

Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382310
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France

Abstract

Design verification methodologies and tool such as DRC and ERC used on MEMS design have been inherited from the transistor based analog and digital full custom design flows. However the devices are defined on a 2D layout, they have a 3D structure. Thus, current tools do not have into account the new features that appear in MEMS design, especially those related with device micro machining. The main consequence on it is that it is necessary to include information of the vertical parameters on the DRC, what is not at all usual in classical design. We claim that the inclusion of such information together with the consequent improvement of tools for DRC, ERC and device parameter extraction, can reduce design and simulation efforts as well as improve the manufacturing yield.

Citation Download Citation

Xavi Marin, Jordi Carrabina, and Joan Bausells "Dynamic checking improves MEMS design methodology", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382310

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