Numerical spring models for behavioral simulation of MEMS inertial sensors

Sitaraman V. Iyer; Tamal Mukherjee

doi:10.1117/12.382307

10 April 2000 Numerical spring models for behavioral simulation of MEMS inertial sensors

Sitaraman V. Iyer, Tamal Mukherjee

Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382307
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France

Abstract

Design of springs is a very important step in the design process of inertial sensor. A procedure for computing the sprint stiffness for any single-chain configuration of beams and a translator which converts beam-based schematic representation of inertial sensor to higher-level behavioral representation are implemented. Combining the spring stiffness computation with the translator, sprint-mass behavioral models of inertial sensor are generated. The behavioral representation is used for rapid design-space exploration. Simulations of the higher-level behavioral representation is used for rapid design-space exploration. Simulations of the higher-level behavioral schematics are 10 to 100 times faster than simulation of the atomic-elements based schematics and the result match to within 5 percent.

Citation Download Citation

Sitaraman V. Iyer and Tamal Mukherjee "Numerical spring models for behavioral simulation of MEMS inertial sensors", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382307

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